Both have the physical properties of density, high hardness, and high wear resistance, as well as good heat resistance, excellent mechanical strength, good insulation in high temperature environments, and good corrosion resistance. They are used Excellent material for manufacturing robotic arms for semiconductor equipment.

How does the ceramic arm used to carry wafers work?

This involves Bernoulli's principle. The so-called Bernoulli refers to a phenomenon. In water or air flow, if the speed is small, the pressure is large, and if the speed is large, the pressure is small. After the inert gas (nitrogen, argon, etc.) is sprayed onto the wafer through the jet port, the gas diffuses rapidly on the upper surface of the wafer. At this time, the air flow speed on the upper surface is greater than the air flow speed on the lower surface, which increases the pressure under the wafer, larger than the top, and then it is adsorbed on the carrying arm.