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Silicon Nitride (Si3N4) Substrates
Silicon Nitride (Si3N4) Substrates

Cersol delivers custom high-performance Silicon Nitride (Si3N4) substrates for modern power electronics. With superior fracture toughness (800 MPa) and thermal conductivity (>80 W/m·K), our solutions outperform Al2O3 and AlN in extreme environments.

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Silicon Nitride (Si3N4) ceramic substrates

Why choose Cersol Silicon Nitride (Si3N4) for your critical components?

A. Unmatched Mechanical Strength: Our Si3N4 substrates feature a typical 3-point bending strength of 800 MPa (Guaranteed >700 MPa), minimizing breakage risks during assembly.
B. High Thermal Performance: With a thermal conductivity of >80 W/m·K, our Si3N4 material dissipates heat efficiently, critical for high-density power devices.
C. Rugged Durability: A fracture toughness of >6.5 MPa·m^1/2 makes our Si3N4 ceramics incredibly resistant to crack propagation.
D. Thermal Compatibility: The CTE of 2.6 × 10⁻⁶/°C (20~200°C) is optimized to match Silicon chips, reducing thermal stress.
E. Chemical Stability: Cersol Si3N4 offers excellent resistance to chemical corrosion and wear.

Detailed Specifications














Material: Silicon Nitride (Si3N4) Color: Off-White

1. Mechanical & Thermal Properties

Parameter

Specification

Notes

Thermal Conductivity

> 80 W/(m·K)

Typical Value

Bending Strength

> 700 (Typ. 800) MPa

3-Point Bending

Fracture Toughness

> 6.5 MPa·m1/2

-

Thermal Expansion (CTE)

2.6 ppm/°C

20~200°C

Density

3.22 g/cm3

-

Young's Modulus

310 GPa

-

Vickers Hardness

15 GPa

-

Specific Heat

680 J/(kg·K)

-

2. Electrical Properties

Parameter

Specification

Notes

Dielectric Constant

7.8

-

Breakdown Strength

> 25 KV/mm

-

Volume Resistivity

1014 Ω·cm

-

OEM & Customization Services

Flexible Si3N4 Dimensions for Your Unique Design

At Cersol, we do not just sell standard plates; we provide comprehensive OEM (Original Equipment Manufacturer) services to fit your specific project requirements. We understand that advanced semiconductor packaging often requires unique geometries.
A. Custom Dimensions: 

We manufacture Si3N4 substrates to your exact length, width, and thickness specifications.
B. Precision Processing: 

Our Si3N4 manufacturing capabilities ensure tight tolerances on dimensions, warpage, and surface roughness.
C. Large Format Capability: 

We are capable of producing large-sized Si3N4 master plates (e.g., up to 190mm x 138mm) which can be diced or processed according to your OEM needs.
D. Prototyping to Volume: 

Whether you need a small batch of Si3N4 prototypes or high-volume OEM production, Cersol is your trusted partner.

Do not compromise on size. Let us build the Si3N4 substrate that perfectly fits your housing and circuit layout.

Challenges & Solutions: Why Choose Si3N4?

Addressing the Limitations of Silicon Nitride (Si3N4)

We believe in transparency. While Si3N4 is the premium choice for power electronics, customers often face specific challenges when adopting it. Here is how Cersol solves them.

Challenge 1: Higher Cost vs. Alumina (Al2O3)

A. The Disadvantage: 

Silicon Nitride (Si3N4) is generally more expensive to manufacture than standard Alumina due to the high-temperature and high-pressure sintering process required.
B. The Cersol Solution: 

We focus on Total Cost of Ownership (TCO). While the initial material cost is higher, the exceptional bending strength (800 MPa) of our Si3N4 reduces the module failure rate to near zero. This eliminates expensive warranty claims and field replacements, making Si3N4 the most cost-effective solution for high-stakes applications like automotive and aerospace.

Challenge 2: Hardness Makes Machining Difficult

A. The Disadvantage: 

With a Vickers hardness of 15 GPa, Si3N4 is incredibly hard, making laser drilling, scribing, and dicing more difficult and time-consuming than softer ceramics.
B. The Cersol Solution: 

Cersol provides comprehensive OEM machining services. We utilize advanced laser processing and precision grinding to deliver ready-to-use Si3N4 substrates with tight tolerances (Warpage <0.45 mm, Ra 0.2-0.5 um). You do not need to worry about machining; we deliver the finished component.

Challenge 3: Lower Thermal Conductivity than AlN

A. The Disadvantage: 

Aluminum Nitride (AlN) typically offers 170+ W/m·K, whereas Si3N4 is >80 W/m·K.
B. The Cersol Solution: 

Thermal conductivity is not the only factor in cooling. Because Si3N4 is so strong, it can be made thinner (e.g., 0.25 mm) compared to AlN, which reduces the thermal resistance path. This allows our Si3N4 to deliver thermal performance comparable to thicker AlN substrates but with vastly superior mechanical reliability.

Frequently Asked Questions (FAQ)

Here are answers to the most frequent inquiries regarding our Si3N4 technology.

Q: What is the thermal conductivity of Cersol Si3N4 substrates?

A: Cersol Si3N4 substrates feature a high thermal conductivity of >80 W/m·K. While Aluminum Nitride (AlN) has higher thermal conductivity, Si3N4 offers a far superior balance of thermal performance and mechanical robustness, making it the preferred choice for high-reliability power modules.

Q: How does Si3N4 compare to Alumina (Al2O3) and Aluminum Nitride (AlN) in terms of strength?

A: Silicon Nitride (Si3N4) is significantly stronger. Cersol Si3N4 has a typical bending strength of 800 MPa and a fracture toughness of >6.5 MPa·m^1/2. This is roughly double the strength of Alumina and triple that of AlN, virtually eliminating the substrate cracking issues common in thermal cycling.

Q: Can you customize the thickness and dimensions of the Si3N4 plates? 

A: Yes. Our standard thicknesses are 0.32 mm and 0.25 mm , but as an OEM provider, we can customize dimensions to fit your specific requirements within our maximum manufacturing size of 190 mm x 138 mm.

Q: What makes Si3N4 ideal for EV (Electric Vehicle) inverters? 

A: The key is the thermal expansion coefficient (CTE). Cersol Si3N4 has a CTE of 2.6 ppm/°C, which closely matches silicon chips. Combined with its high mechanical strength, it withstands the extreme vibration and temperature shifts in EV powertrains better than any other ceramic material.

Why Partner with Cersol?

Cersol is dedicated to advancing ceramic technology. Our strict quality control over the Silicon Nitride (Si3N4) manufacturing process guarantees consistent performance batch after batch. By choosing Cersol, you gain a partner committed to delivering high-quality Si3N4 solutions tailored to your OEM specifications.

Ready to start your project? Contact us today for a consultation on your custom Si3N4 substrate needs.

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