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Y2O3 | Yttrium Oxide Ceramics

Cersol focuses on the research and development and manufacturing of high-purity yttrium oxide ceramics (Y₂O₃). Based on the cubic crystal structure, it creates high-performance materials that are resistant to high temperatures (>1800°C), corrosion, and plasma through precision powder preparation, molding, and sintering processes. Products cover four categories: high-purity ceramics, electrical insulation ceramics, mold components, and functional coatings. They are widely used in semiconductor equipment, microelectronic packaging, and corrosive environments, effectively reducing wafer contamination and extending equipment life.

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Cersol Yttrium Oxide Ceramics Product Introduction

1. Introduction to the Raw Materials of Yttrium Oxide Ceramics

Yttrium oxide (Y2O3) is the most important yttrium compound. It is insoluble in water and alkali, soluble in acid, and has the appearance of white crystalline powder (the crystal structure belongs to the cubic system). It has very good chemical stability and low volatility under vacuum, high heat resistance, corrosion resistance, high dielectric, and transparency (infrared). Cersol uses high-purity yttrium oxide powder (Y₂O₃) as the core raw material, and the yttrium oxide ceramics produced have the following characteristics:
Purity advantage: The purity of the raw materials is as high as 99.99% or more, and the content of transition metals (such as K, Na, Fe, Cu, Ni) is strictly controlled to avoid the risk of metal contamination in electronic manufacturing.
Powder characteristics: Through the independently developed powder synthesis technology, yttrium oxide granulated powder with uniform particle size distribution, high sphericity and smooth surface is prepared to ensure the density of the ceramic body and the stability of performance after sintering.
Functional adaptation: According to the application scenario requirements, the powder formula can be customized to optimize core indicators such as high temperature resistance, plasma corrosion resistance or electrical insulation.

2. Manufacturing process of yttrium oxide ceramics

Cersol uses a precise process chain to ensure product performance, covering three key links: powder preparation, molding, and sintering:
Powder preparation: Adopt wet chemical synthesis and spray granulation technology to accurately control the powder morphology, particle size (micrometer level) and uniformity, and provide raw materials with high fluidity and low defect rate for subsequent molding.
Molding process: Combined with dry pressing, isostatic pressing and other molding technologies, by precisely controlling pressure, holding time and mold design, the size accuracy and structural integrity of the blank are ensured to avoid defects such as cracks and pores.
Sintering technology: Customized sintering curve (temperature, rate, holding time), inhibit abnormal grain growth, achieve nearly full densification of ceramics, and give the material excellent mechanical strength (bending strength>170 MPa) and high temperature stability (temperature resistance>00℃).

Items		Units	Y2O3
Type		/	CYO952	CYO998
Color		/	White	White
Density		g/cm3	＞4.85	＞4.95
Water absorption		%	0	0
Particle Size	average	μm	1.21	1.15
	range	μm	0.4-2.55	0.2-2.8
Three-point bending strength		Mpa	170	170
Young's modulus		Gpa	180	180
Vickers hardness		Gpa	6.5	6
Coefficient of thermal expansion	RT～800℃	*10 -6/ 0C	7.2	7.2
Thermal conductivity	25℃	W/(m•k)	14.5	14
Specific heat		J/g・K	0.45	0.45
Volume resistivity		Ω•cm	＞10^13	＞10^13
Dielectric constant		/	11	11
Dielectric loss factor		×10 -4	55	/
Dielectric breakdown voltage		KV/mm	11	11

3. Classification of yttrium oxide ceramics

Cersol provides multi-dimensional classification solutions to meet the needs of different industrial scenarios:
Classification by performance
High-purity yttrium oxide ceramics (purity ≥ 99.99%): specially designed for electronic component manufacturing equipment, with outstanding plasma corrosion resistance, suitable for semiconductor etching and deposition processes, reducing equipment maintenance frequency and extending service life.
High electrical insulation yttrium oxide ceramics: low dielectric constant and high resistivity, used for high-voltage reaction chamber components (such as upper electrode coating), effectively preventing current leakage and signal interference.

Classification by application
Mold component ceramics: such as yttrium oxide ceramic rings, insulating substrates, etc., provide a stable dielectric environment for plasma processing devices, avoid arc discharge, and improve the yield of electronic component manufacturing.
Functional coating ceramics: dense yttrium oxide coatings are formed through plasma spraying technology, covering the surface of substrates such as aluminum alloys and quartz, resisting high temperature, plasma erosion and chemical corrosion, and reducing particle contamination in micromachining.

4. Core applications of yttria ceramics

Cersol products have been widely used in the field of high-precision electronic manufacturing:
Semiconductor equipment: As key components of etcher and ion implanter (such as ceramic rings, nozzles, chamber linings), they remain stable in high-density plasma environments, reduce wafer contamination, and improve chip yield.
Microelectronics packaging: Used for insulating substrates and packaging brackets of high-frequency devices, with low dielectric loss and high thermal conductivity, to ensure signal transmission efficiency and heat dissipation performance.
Corrosion-resistant components: In chemical vapor deposition (CVD) and LED epitaxial equipment, they resist the corrosion of fluoride and chlorine-based gases and extend the equipment maintenance cycle.
Functional coating protection: Provide yttria coatings for key components of electronic manufacturing equipment, reduce the risk of metal contamination, and solve the problem of component defects caused by fluoride deposition. It is known as the "scavenger of microelectronics manufacturing."
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