Alumina ceramics and silicon carbide ceramics have the physical properties of dense quality, high hardness, and high abrasion resistance, as well as good thermal resistance, excellent mechanical strength, good insulation, good corrosion resistance, etc. It is an excellent material for making semiconductor equipment robotic arms.
But in terms of performance, the robotic arm made of silicon ceramics is better than the robotic arm made of alumina ceramics.
Normally sintering silicon carbide ceramic products are made of high-purity and ultra-fine silicon carbide microfillings. It is made of 2450℃ high-temperature sintering. The silicon carbide content is above 99.1%, and the density of the product is ≥3.10g/cm3.