The porous ceramic air floating plate combines a porous alumina ceramic surface with an aluminum alloy base for non-contact handling of flat workpieces. Compressed air passes through the porous ceramic restrictor to form a micrometer-scale air film, supporting glass substrates and large-diameter wafers during transfer.

Non-Contact Support for Flat Workpieces

• Distributed airflow through the porous alumina surface supports workpieces without sliding contact during normal flotation.
• The supporting air film helps reduce contact-related scratches during substrate handling.
• Plain and grooved surface configurations support different equipment layouts.
• A 100 mm width and four listed lengths provide options for arranging substrate support.

Models and Surface Options

Model designation

Example model	Surface	Nominal length
ASP-PS-500	Plain surface	500 mm
ASP-GS-500	Grooved surface	500 mm

ASP denotes Aerostatic Plate. PS denotes Plain Surface, and GS denotes Grooved Surface. The final number indicates length in millimeters. Confirm the selected surface configuration and connection layout against the product drawing.

Technical Specifications

Air floating plate specifications

Parameter	Specification
Base material	Aluminum alloy
Working surface	Porous alumina ceramic
Width	100 mm
Available lengths	250, 500, 750 and 1500 mm
Positive / negative pressure port size	G1/8
Positive-pressure ports	1
Negative-pressure ports	2 per 250 mm, as listed in the selection manual
Flatness	20 µm/m
Air supply pressure	≤ 0.2 MPa
Air film thickness	50–300 µm
Load capacity	≥ 350 kg/m² at 0.2 MPa
Air consumption	20 L/min per 500 mm at 0.2 MPa
Compressed air quality	ISO 8573-1 class 1.6.2, as specified in the selection manual
Installation orientation	Horizontal
Mounting	M5 bolts
Weight	≤ 3.8 kg per 500 mm

Load capacity and air consumption are stated at the specified supply pressure. Air film thickness depends on operating conditions. Final dimensions, port layouts and acceptance requirements are subject to the confirmed drawing.

Applications

• Non-contact transfer of glass substrates.
• Support and handling of large-diameter wafers.
• Flat workpiece conveying systems requiring reduced sliding contact.

Installation and Selection

Install the plate horizontally using M5 bolts and connect an air supply meeting the specified cleanliness class. Keep supply pressure within 0.2 MPa. Select plate length, surface configuration and support arrangement according to workpiece dimensions and load. Confirm negative-pressure operating requirements and port connections for the selected model before installation.

Frequently Asked Questions

How does the air floating plate support a workpiece?

Compressed air passes through the porous alumina ceramic surface and forms an air film between the plate and the workpiece, providing non-contact support.

What is the difference between PS and GS models?

PS identifies a plain surface, while GS identifies a grooved surface. Select the configuration according to the equipment design and confirmed product drawing.

What information is needed for selection?

Provide the workpiece material, dimensions, thickness and weight, together with the support layout, available air supply and required operating air gap.